Description
Characteristics
| 1 to 3 axes motion version for choice | Travel to 600μm in one single axis | Travel to 200μm/axis for multiple axes version | |
| Optional closed-loop sensor | Aperture of 45×45mm |
Applications
| Scanning microscopy | Confocal microscopy | Surface measurement | Semiconductor test |
| Wafer positioning | Image processing and stabilization |
| Technical Data | |||||||||
|
Type |
S-Closed loop |
P12A.X200S |
P12A.Z200S |
P12A.Z400S |
P12A.Z600S |
P12A.XY200S P12A.XY200K |
P12A.XZ200S |
P12A.XYZ200S |
Units |
| Active axes |
X |
Z |
Z |
Z |
X、Y |
X、Z |
X、Y、Z |
|
|
| Drive control |
1 driving channels 1sensing channels |
1 driving channels 1sensing channels |
1 driving channels 1sensing channels |
1 driving channels 1sensing channels |
2 driving channels 2 sensing channels |
2 driving channels 2 sensing channels |
3 driving channels 3sensing channels |
|
|
| Nominal travel（0~120V） |
160 |
160 |
320 |
480 |
160/axis |
160/axis |
160/axis |
μm±20% |
|
| Max.travel（0~150V） |
200 |
200 |
400 |
600 |
200/axis |
200/axis |
200/axis |
μm±20% |
|
| Sensor type |
SGS/- |
SGS/- |
SGS/- |
SGS/- |
SGS/- |
SGS/- |
SGS/- |
|
|
| Resolution |
5.5/2 |
5.5/2 |
11/3.5 |
16/5 |
5.5/2 |
5.5/2 |
5.5/2 |
nm |
|
| Linearity |
0.3/- |
0.3/- |
0.4/- |
0.5/- |
0.4/- |
0.4/- |
0.5/- |
%F.S. |
|
| Repeatability |
0.2/- |
0.2/- |
0.3/- |
0.4/- |
0.3/- |
0.3/- |
0.4/- |
%F.S. |
|
| Unloaded resonant frequency |
160 |
160 |
130 |
80 |
X160/Y140 |
X160/Z140 |
X150/Y130/Z90 |
Hz±20% |
|
| Load capacity | Horizontal |
0.5 |
0.5 |
0.4 |
0.3 |
0.4 |
0.4 |
0.3 |
kg |
| Vertical | 0.03 | 0.03 | 0.02 | 0.01 | 0.02 | 0.01 | 0.01 | ||
| Inverted | 0.5 | 0.03 | 0.02 | 0.01 | 0.4 | 0.02 | 0.01 | ||
| El.capacitance |
7.2 |
7.2 |
14.4 |
21.6 |
7.2/axis |
7.2/axis |
7.2/axis |
μF±20% |
|
| Material |
Steel, Al |
Steel, Al |
Steel, Al |
Steel, Al |
Steel, Al |
Steel,AI |
Steel, Al |
|
|
Note: Above are measured using E00/E01 piezo controllers. The max driving voltage can be -20V~150V; Recommended voltage 0~120V for high-reliability and long-term use.
| Mounting Method | Horizontal Mounting | Vertical Mounting | Inverted Mounting |
| Definition |
Place the PZT platform horizontally for installation, with the moving surface located above the PZT platform and parallel to the horizontal plane.
PS: Default direction for carrying capacity in the parameter table
|
Place and install the PZT platform vertically, with the moving surface parallel to the direction of gravity PS:There are multiple vertical installation methods, and the technical data corresponds to the minimum load capacity |
Place the PZT platform horizontally, but the moving surface is located below the PZT platform |
| Diagram |  |
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| Note | When the mounting method is selected as vertical mounting, pay attention to the outlet port | ||
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