Description
Features
| 3 axes | Multiple travel range available | Closed-loop sensor available | Frictionless, high precision flexible guiding system |
| High scanning flatness | Multiple sizes of aperture available |
Applications
| Scanning microscope | Mask/wafer positioning | Interferometry | Metrology |
| Biotechnology | Micromanipulation |
| Technical Data | |||||||||
| Type | P15.XY100S-C
P15.XY100K-C |
P15.XYZ100S
P15.XYZ100K |
P15.XYZ300SP15.XYZ300K | P15.XYZ300S-CP15.XYZ300K-C | P15.XYZ300S-A P15.XYZ300K-A |
P15.XY500Z200S P15.XY500Z200K |
Units | ||
| Active axes | X、Y | X、Y、Z | X、Y、Z | X、Y、Z | X、Y、Z | X, Y, Z | |||
| Driving channels | 2 driving channels 2 sensing channels |
3 driving channels 3 sensing channels |
3 driving channels 3 sensing channels |
4 driving channels 3 sensing channels |
4 driving channels 3 sensing channels |
3 driving channels
3 sensing channels |
|||
| Travel(0~120V) | 80/axis | 100/axis | 240/axis | XY±120/axis
Z240 |
XY±120/axis
Z240 |
XY400/Z160 | μm±10% | ||
| Max.travel(0~150V) | 100/axis | 120/axis | 300/axis | XY±150/axis
Z300 |
XY±150/axis
Z300 |
XY500/Z200 | μm±10% | ||
| Sensor | SGS/- | SGS/- | SGS/- | SGS/- | SGS/- | SGS/- | |||
| Aperture | 66×66 | 60×60 | 66×66 | 66×66 | 66×66 | 66×66 | mm | ||
| Resolution | 3.5/1 | 3.5/1 | 8/2.5 | 8/2.5 | 10/5 | 15/10 | nm | ||
| Linearity | 0.15/- | 0.2/- | 0.2/- | 0.2/- | 0.2/- | 0.3/- | %F.S. | ||
| Closed loop
repeatability |
0.1/- | 0.1/- | 0.1/- | 0.15/- | 0.15/- | 0.2/- | %F.S. | ||
| Pitch/yaw/roll | <30 | 30 | <30 | <150 | <100 | <30 | μrad | ||
| Push/pull force | 60/10 | 100/20 | 50/10 | 200/10 | 200/10 | 100/10 | N | ||
| Stiffness | 0.6 | 0.8 | 0.1 | 1 | 1 | 0.3 | N/μm±20% | ||
| Unloaded resonant
frequency |
200 | 300/350/400 | 140/170/220 | 190/145/249 | 180/200/200 | 140/170/150 | Hz±20% | ||
| Resonant
frequency at loading |
45（@6kg） | – | – | 145/110/145 （@300g） |
49/49/69 （@5kg） |
– | Hz±20% | ||
| Closed/open-loop
unloaded step time |
– | – | 60/10 | – | – | – | ms±20% | ||
| Load capacity | Horizontal | 6 | 2 | 0.5 | 3 | 5 | 5 | kg | |
| Vertical | 0.5 | 1 | 0.05 | 0.5 | 1 | 0.5 | |||
| Inverted | 6 | 1 | 0.5 | 0.5 | 1 | 5 | |||
| El. capacitance | 10.8/axis | XY7.2/Z14.4 | XY10.8/Z13.2 | 21.6/axis | 21.6/21.6/43 | XY18/Z28.8 | μF±20% | ||
| Material | Aluminum | Steel, Aluminum | Aluminum | Steel, Aluminum | Steel, Aluminum | Steel, Aluminum | |||
| Mass(no cable) | <1.1 | 0.7 | 0.83 | – | – | 1.8 | kg±5% | ||
Note: Max driving voltage could be -20V~150V, Recommended voltage 0~120V for long-term and high-reliable operation. Technical data is measured by CoreMorrow E00/E01 series piezo controller.
| Mounting Method | Horizontal Mounting | Vertical Mounting | Inverted Mounting |
| Definition |
Place the PZT platform horizontally for installation, with the moving surface located above the PZT platform and parallel to the horizontal plane.
PS: Default direction for carrying capacity in the parameter table
|
Place and install the PZT platform vertically, with the moving surface parallel to the direction of gravity PS:There are multiple vertical installation methods, and the technical data corresponds to the minimum load capacity
|
Place the PZT platform horizontally, but the moving surface is located below the PZT platform |
| Diagram |  |
 |
 |
| Note | When the mounting method is selected as vertical mounting, pay attention to the outlet port | ||
|
|
|
|
|
