Description
Characteristics
| Travel to 200μm | Load capacity to 900g | Millisecond response time | Closed loop for higher repeatability |
| Excellent focusing stability |
| Appearance
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Moving Part
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Match brands/sizes of objectives
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| Large Load Capacity, High Frequency
P76 Piezo Objective Scanner has a maximum load of 500g. It is compatible with large field of view objectives commonly used in multiphoton microscopy and confocal microscopy applications. P76 Piezo Objective Positioner can be used to match a variety of standard lenses such as Zeiss, Nikon, Olympus, and Leica. It can also be used in conjunction with a manual adjustment stage via an adapter. |
Frequency and Load Curve
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Application Cases-Wafer Cutting(Click to watch video)
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| Adjustable response time
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Driving and Control
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Closed-Loop Curve
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Applications
| Adjustment focus | Image processing | Confocal microscope | Semiconductor inspection |
| Laser processing | Interference shape measurement |
| Technical data | ||||||||
| Models | S-Closed loop K-Open loop |
P76.Z50S
P76.Z50K |
P76.Z70S
P76.Z70K |
P76.Z80S
P76.Z80K |
P76.Z100S
P76.Z100K |
P76.Z150S44
P76.Z150K44 |
P76.Z200S
P76.Z200K |
Units |
| Active axes | Z | Z | Z | Z | Z | Z | ||
| Drive control | 1 driving channel
1 sensing channel |
1 driving channel
1 sensing channel |
1 driving channel
1 sensing channel |
1 driving channel
1 sensing channel |
1 driving channel
1 sensing channel |
1 driving channel
1 sensing channel |
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| Travel range（0~120V） | 40 | 60 | 64 | 80 | 108 | 160 | μm±10% | |
| Max.travel range（0~150V） | 50 | 75 | 80 | 100 | 135 | 200 | μm±10% | |
| Sensor type | SGS/- | SGS/- | SGS/- | SGS/- | SGS/- | SGS/- | ||
| Resolution | 1.5/0.5 | 2/1 | 3/1 | 3/1 | 5/1.5 | 5.5/2 | nm | |
| Linearity | 0.03/- | 0.03/- | 0.03/- | 0.03/- | 0.03/- | 0.1/- | %F.S. | |
| Repeatability | 0.02/- | 0.02/- | 0.02/- | 0.02/- | 0.06/- | 0.05/- | %F.S. | |
| Push/pull force | 35/10 | 180/16 | – | 70/10 | – | – | N | |
| Stiffness | 0.8 | 3 | – | 0.8 | – | – | N/μm±20% | |
| Unloaded resonant frequency | 800 | 1800 | 1700 | 800 | 890 (330@500g) |
900 | Hz±20% | |
| Closed-loop operating frequency（-3dB） | – | – | – | 160（unloaded） | – | – | Hz±20% | |
| Unloaded step time | 5/2 | 1.6/1 | 15@24μm、900g/- | 5/2 | 25@500g/10 | 10/4 | ms±20% | |
| Load capacity | 0.5 | 0.5 | 0.9 | 0.5 | 0.5 | 0.5 | kg | |
| El.capacitance | 3.2 | 7.2 | 14.4 | 7.2 | 19.2 | 28.8 | μF±20% | |
| Material | Steel | Steel, Al | Steel, Al | Steel, Al | Al,Ti | Steel, Al | ||
| Mass | 430 | 520 | 765 | 500 | 525(including wires and connectors) | 740 | g±5% | |
Note: Above parameters are measured with the E00/E01 series piezo controller. The maximum driving voltage can be -20V~150V; for high reliability long-term use, the recommended driving voltage is 0~120V.
Experimental Results of Operating Frequency vs Travel(For Reference only)
| P76.Z100S piezo objective scanner is drived by E52.B1S-I3 piezo controller（300mA） | |
| Travel | Max. operating frequency |
| 50μm | 60Hz |
| 80μm | 35Hz |
| 100μm | 25Hz |
| Note：Above specs are measured under the condition of room temperature, loading 250g load, no travel attenuation and sine wave driving. For Reference only. | |
| P76.Z70S is drived by E52.B1S-H piezo controller（Ave.current 237mA） | |
| Travel | Max.operating frequency |
| 0.5μm | 300Hz |
| 1μm | 250Hz |
| 2μm | 250Hz |
| 5μm | 250Hz |
| 10μm | 200Hz |
| 20μm | 150Hz |
| 50μm | 90Hz |
| 60μm | 70Hz |
| 70μm | 60Hz |
| Note：Above specs are measured under the condition of room temperature, loading 250g load, no travel attenuation. For Reference only. | |
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