piezoelectric materials, piezoelectric ceramic, piezo stack, precision piezoelectric actuators, piezoelectric motor, piezoelectric linear motor, 1 to 6 axes precision positioning and scanning stage, 1 to 3 axes precision piezoelectric deflection mirrors/platforms, piezoelectric objective scanners, six degrees of freedom parallel mechanism,Hexapod, piezoelectric ceramic power supply, piezoelectric driver/controller, LVDT/capacitance/laser measuring system