Description
Characteristics
• Load capacity to 25kg • Travel range: 0~50μm • Vacuum version is optional • Aperture: Ø36~310mm • Optional upright, lateral, inverted mounting
Applications
• Microscopic imaging • Surface inspection • Precision positioning • Optical capture • Optical interference / measurement • Phase shifter
P77 Family
| Type | P77.S242 P77.K242 |
P77.30S140 P77.30K140 |
P77.S310 P77.K310 |
P77.S154 P77.K154 |
P77.S106 P77.K106 |
P77.S106A P77.K106A |
Units | |||||||||
| Active axes | Z | Z | Z | Z | Z | Z | ||||||||||
| Travel range (0~120V) |
14 | 12.8/25.6 | 13.5 | 16 | 14 | 14 | μm±10% | |||||||||
| Travel range (0~150V) |
17.5 | 16/32 | 17 | 20 | 17.5 | 17.5 | μm±10% | |||||||||
| Sensor | SGS/- | SGS/- | SGS/- | SGS/- | SGS/- | SGS/- | ||||||||||
| Aperture | Φ242 | Φ140 | Φ310 | Φ155 | Φ106 | Φ106 | mm | |||||||||
| Resolution | 0.5/0.2 | 0.5/0.2 | 0.5/0.2 | 0.5/0.2 | 0.5/0.2 | 0.5/0.2 | nm | |||||||||
| Pitch/yaw/roll | <15 | <15 | – | <10 | <10 | <10 | μrad | |||||||||
| Push/pull force | 100/20 | 80/15 | 100/20 | 50/30 | 100/20 | 100/20 | N | |||||||||
| Unloaded resonant frequency | 3090 | 200 | 1500 | 1300 | 300 | 150 | Hz±20% | |||||||||
| Unloaded step time | 20 | 14/7 | – | 3.5/2 | 5/2.5 | 3.5 | ms±20% | |||||||||
| Upright | 15 | – | 12 | 25 | 15 | 10 | ||||||||||
| Load capacity | Lateral | 1 | 5 | 12 | 20 | 5 | 5 | kg | ||||||||
| Inverted | 10 | – | 12 | 20 | 10 | 5 | ||||||||||
| El. capacitance | 5.4 | 14.4/28.8 | 10.8 | 14.4 | 5.4 | 7.2 | μF±20% | |||||||||
| Material | Al, steel | Al, steel | Al, steel | Al, steel | Al | Al, steel | ||||||||||
| Mass | 3800(not include cable) |
4200 | 4200 | 3020 | 1600 | 1900(not include cable) |
g±5% | |||||||||
| Operating temperature | -20~80 | -20~80 | -20~80 | -20~80 | -20~80 | -20~80 | °C | |||||||||
| Connector | LEMO | LEMO | LEMO | LEMO | LEMO | LEMO | ||||||||||
| Cable length | 1.5 | 1.5 | 1.5 | 1.5 | 1.5 | 1.5 | m±10mm | |||||||||
| Type | P77.S36 P77.K36 |
P77.S160 P77.K160 |
P77.S160A P77.K160A |
P77.S210 P77.K210 |
P77.50S85 P77.50K85 |
Units | ||||||||||
| Active axes | Z | Z | Z | Z | Z | |||||||||||
| Travel range(0~120V) | 14 | 14 | 14 | 14 | 40 | μm±10% | ||||||||||
| Travel range(0~150V) | 17.5 | 17.5 | 17.5 | 17.5 | 50 | μm±10% | ||||||||||
| Sensor | SGS/- | SGS/- | SGS/- | SGS/- | SGS/- | |||||||||||
| Aperture | Φ36 | Φ160 | Φ160 | Φ210 | Φ85 | mm | ||||||||||
| Resolution | 0.5/0.2 | 0.5/0.2 | 0.5/0.2 | 0.5/0.2 | 1.5/0.4 | nm | ||||||||||
| Pitch/yaw/roll | <10 | <10 | <10 | <10 | – | μrad | ||||||||||
| Push/pull force | 100/20 | 100/20 | 100/20 | 100/20 | – | N | ||||||||||
| Unloaded resonant frequency | 300 | 140 | 120 | 100 | 1100 | Hz±20% | ||||||||||
| Unloaded step time | 2 | 2.5 | 3.5 | 2.5 | 15@10μm | ms±20% | ||||||||||
| Upright | 7 | 10 | 10 | 10 | 3 | |||||||||||
| Load capacity |
Lateral | 1 | 5 | 5 | 5 | – | kg | |||||||||
| Inverted | 5 | 5 | 2 | 5 | – | |||||||||||
| El. capacitance | 3.6 | 5.4 | 7.2 | 5.4 | 7.2 | μF±20% | ||||||||||
| Material | Aluminum, steel | Aluminum, steel | Aluminum, steel | Aluminum, steel | Aluminum, steel | |||||||||||
| Mass | 565 (not include cable) |
2400 | 2900 | 2890 (not include cable) |
2100 | g±5% | ||||||||||
| Operating temperature | -20~80 | -20~80 | -20~80 | -20~80 | -20~80 | °C | ||||||||||
| Connector | LEMO | LEMO | LEMO | LEMO | LEMO | |||||||||||
| Cable length | 1.5 | 1.5 | 1.5 | 1.5 | 1.5 | m±10mm | ||||||||||
