Description
| S37.xxS/KF Technical Data | ||||||||
| Types | S-closed loop
K-open loop |
S37.T2SF
S37.T2KF |
S37.T3SF
S37.T3KF |
S37.T4SF
S37.T4KF |
S37.T5SF
S37.T5KF |
S37.T6SF
S37.T6KF |
S37.T8SF
S37.T8KF |
Units |
| Active axis | θX，θY | θX，θY | θX，θY | θX，θY | θX，θY | θX，θY | ||
| Drive control | 3 driving channels
2 sensing channels |
3 driving channels
2 sensing channels |
3 driving channels
2 sensing channels |
3 driving channels
2 sensing channels |
3 driving channels
2 sensing channels |
3 driving channels
2 sensing channels |
||
| Tilt angle(0~120V) | 2.5/±1.2 | 3.5/±1.7 | 5.0/±2.5 | 6.0/±3.0 | 7.5/±3.7 | 10.0/±5.0 | mrad±20% | |
| Max.tilt angle(0~150V) | 3.0/±1.5 | 4.5/±2.2 | 6.0/±3.0 | 7.5/±3.7 | 9.0/±4.5 | 12.5/±6.2 | mrad±20% | |
| Integrated sensor | SGS/- | SGS/- | SGS/- | SGS/- | SGS/- | SGS/- | ||
| Resolution | 0.08 (≈0.02″)
0.03 (<0.01″) |
0.15 (≈0.03″
0.04 (<0.01″) |
0.2 (≈0.04″)
0.05 (≈0.01″) |
0.25 (≈0.05″)
0.07 (≈0.01″) |
0.25 (≈0.05″)
0.08 (≈0.02″) |
0.35 (≈0.07″)
0.1 (≈0.02″) |
μrad | |
| Linearity | 0.1/- | 0.1/- | 0.1/- | 0.1/- | 0.1/- | 0.1/- | %F.S. | |
| Repeatability | 0.02/- | 0.02/- | 0.02/- | 0.02/- | 0.02/- | 0.02/- | %F.S. | |
| Unloaded resonant frequency | 6.5 | 6.4 | 6.3 | 6.2 | 6.1 | 6 | kHz±20% | |
| El. capacitance | 3.6 | 5.2 | 7.2 | 9 | 11 | 14.5 | μF±20% | |
| Material | Steel, titanium | Steel, titanium | Steel, titanium | Steel, titanium | Steel, titanium | Steel, titanium | ||
| Mass | 200 | 230 | 250 | 275 | 300 | 350 | g±5% | |
| Platform Length | 37 | 46 | 55 | 64 | 73 | 91 | mm±0.1 | |
| S37.xxS/KF Drawing(Click on the picture to enlarge it) |
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