Description
Characteristics
• Optional 30μm/60μm displacement • Load to 8kg • Repeatability to 12nm • Open/closed loop • UHV version is available
1~3 Axes
P66 family include: P66.X(X axis), P66.Z(Z axis), P66.XY(XY axes), P66.XZ(XZ axes), P66.XYZ(XYZ axes).
Open/Closed-Loop Version
P66 could be selected as an open-loop or closed-loop version. Closed-loop version is equipped with high-resolution and fastresponding strain sensor (SGS). The sensor feedbacks highbandwidth, high-precision voltage signals. The sensor uses full-bridge configuration to eliminate thermal drift, allowing piezo nanopositioning stages to achieve high linearity and repeatability.
Applications
• Interference / scanning • Metering • Micromachining / precision control • CD disc test
| Type | S-Closed loop K-Open loop |
P66.X30S P66.X30K |
P66.X60S P66.X60K |
P66.Z30S P66.Z30K |
P66.XY30S P66.XY30K |
P66.XY60S P66.XY60K |
P66.XZ30S P66.XZ30K |
P66.XYZ30S P66.XYZ30K |
Units | |||||||||||||||||||||||
| Active axes | X | X | Z | X, Y | X, Y | X, Z | X, Y, Z | |||||||||||||||||||||||||
| Travel range(0~120V) | 24 | 48 | 24 | 24/axis | 48/axis | 24/axis | 24/axis | μm±10% | ||||||||||||||||||||||||
| Travel range(0~150V) | 30 | 60 | 30 | 30/axis | 60/axis | 30/axis | 30/axis | μm±10% | ||||||||||||||||||||||||
| Sensor | SGS/- | SGS/- | SGS/- | SGS/- | SGS/- | SGS/- | SGS/- | |||||||||||||||||||||||||
| Closed/open loop resolution |
1/0.5 | 2/0.5 | 1/0.5 | 1/0.5 | 2/0.5 | 1/0.5 | 1/0.5 | nm | ||||||||||||||||||||||||
| Closed-loop linearity | 0.1/- | 0.1/- | 0.1/- | 0.1/- | 0.15/- | 0.1/- | 0.15/- | %F.S. | ||||||||||||||||||||||||
| Repeatability | 0.05/- | 0.05/- | 0.05/- | 0.08/- | 0.1/- | 0.08/- | 0.1/- | %F.S. | ||||||||||||||||||||||||
| Pitch/yaw/roll | <15 | <20 | <15 | <15 | <20 | <15 | <15 | µrad | ||||||||||||||||||||||||
| Push/pull force capacity | 120/15 | 160/16 | 30/10 | 100/15 | 120/12 | 30/10 | 30/10 | N | ||||||||||||||||||||||||
| Stiffness in motion direction |
4.4 | 2.8 | 1.1 | 3.3 | 2.1 | 1.1 | 1.1 | N/μm±20% | ||||||||||||||||||||||||
| Unloaded resonant frequency |
5 | 2.8 | 1.4 | X0.9/Y1.6 | X0.9/Y1.2 | X1.5/Z0.8 | X0.6/Y0.7/Z1.2 | kHz±20% | ||||||||||||||||||||||||
| Closed/open-loop unloaded step time |
5/0.8 | 10/1.6 | 15/1 | 8/0.8 | 20/1.6 | 20/1 | 30/1 | ms±20% | ||||||||||||||||||||||||
| Closed-loop operating frequency (-3dB) |
600 (unloaded) |
500 (unloaded) |
– | – | – | – | 100 (unloaded) |
Hz±20% | ||||||||||||||||||||||||
| Load capacity | 8 | 6 | 1 | 5 | 4 | 1 | 1 | kg | ||||||||||||||||||||||||
| El. capacitance | 3.6 | 7.2 | 3.6 | 3.6/axis | 7.2/axis | 3.6/axis | 3.6/axis | μF±20% | ||||||||||||||||||||||||
| Material | Aluminum | Aluminum | Aluminum | Aluminum | Aluminum | Aluminum | Aluminum | |||||||||||||||||||||||||
| Mass | 120 | 190 | 200 | 260 | 450 | 320 | 460 | g±5% | ||||||||||||||||||||||||
Note: Max driving voltage could be -20V~150V, recommended voltage 0~120V for long-term and high-reliable operation to extend lifetime. Technical data is measured by CoreMorrow E00/E01 series piezo controller.
