Description
Features
| Stroke to 60μm | Load to 6kg | Sub-millisecond response time | Open/closed loop |
Applications
| Interference / scanning | Metering | Micromachining / precision control | CD driving test |
| Technical data | |||
| Models | S-Closed loop
K-Open loop |
P66.X60S
P66.X60K |
Untis |
| Active axes | X | ||
| Drive control | 1 driving channel 1 sensing channel | ||
| Travel range（0~120V） | 48 | μm±10% | |
| Max.travel range（0~150V） | 60 | μm±10% | |
| Integrated sensor | SGS/- | ||
| Closed/open loop resolution | 2/0.5 | nm | |
| Closed-loop linearity | 0.1/- | %F.S. | |
| Repeatability | 0.05/- | %F.S. | |
| Pitch/Yaw/Roll | <20 | µrad | |
| Push/pull force capacity | 160/16 | N | |
| Stiffness in motion direction | 2.8 | N/μm±20% | |
| Unloaded resonant frequency | 2.8 | kHz±20% | |
| Closed/open-loop unloaded Step time | 10/1.6 | ms±20% | |
| Closed-loop operating frequency（-3dB） | 500（unloaded） | Hz±20% | |
| Load capacity | Horizontal | 6 | kg |
| Vertical | 0.1 | ||
| Inverted | 6 | ||
| Electrical capacitance | 7.2 | μF±20% | |
| Material | Aluminum | ||
| Mass | 190 | g±5% | |
| Mounting Method | Horizontal Mounting | Vertical Mounting | Inverted Mounting |
| Definition |
Place the PZT platform horizontally for installation, with the moving surface located above the PZT platform and parallel to the horizontal plane.
PS: Default direction for carrying capacity in the parameter table
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Place and install the PZT platform vertically, with the moving surface parallel to the direction of gravity PS:There are multiple vertical installation methods, and the technical data corresponds to the minimum load capacity
|
Place the PZT platform horizontally, but the moving surface is located below the PZT platform |
| Diagram |  |
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| Note | When the mounting method is selected as vertical mounting, pay attention to the outlet port | ||
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