Description
| Technical Data | |||
| Models | S-Closed loop K-Open loop |
P11.XYZ100S P11.XYZ100K |
Units |
| Active axes | X,Y,Z | ||
| Drive control | 3 driving channels 3 sensing channels | ||
| Travel range(0~120V) | 80/axis | μm±20% | |
| Max.travel range(0~150V) | 100/axis | μm±20% | |
| Integrated sensor | SGS/- | ||
| Closed/open loop resolution | 3/0.1 | nm | |
| Closed-loop linearity | 0.1/- | %F.S. | |
| Repeatability | 0.05/- | %F.S. | |
| Pitch/Yaw/Roll | <10 | μrad | |
| Push/pull force capacity | 30/5 | N | |
| Stiffness | X0.25/Y0.3/Z0.2 | N/μm±20% | |
| Unloaded resonant frequency | X0.2/Y0.3/Z0.18 | kHz±20% | |
| Closed / open-loop unloaded Step time | 20/0.8 | ms±20% | |
| Closed-loop operating frequency (-3dB) | – | Hz±20% | |
| Load capacity | Horizontal | 0.6 | kg |
| Vertical | 0.04 | ||
| Inverted | 0.04 | ||
| Electrical capacitance | 1.8/axis | μF±20% | |
| Material | Steel, Aluminum | ||
| Mass | 230 | g±5% | |
Note: Max driving voltage could be -20V~150V, Recommended voltage 0~120V for long-term operation to extend lifetime.
| Mounting Method | Horizontal Mounting | Vertical Mounting | Inverted Mounting |
| Definition |
Place the PZT platform horizontally for installation, with the moving surface located above the PZT platform and parallel to the horizontal plane.
PS: Default direction for carrying capacity in the parameter table
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Place and install the PZT platform vertically, with the moving surface parallel to the direction of gravity PS:There are multiple vertical installation methods, and the technical data corresponds to the minimum load capacity |
Place the PZT platform horizontally, but the moving surface is located below the PZT platform |
| Diagram |  |
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| Note | When the mounting method is selected as vertical mounting, pay attention to the outlet port | ||
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