Description
Characteristics
| Motion in X | Travel to 38μm | Load capacity to 100g | Closed-loop or UHV version available |
Typical Applications
| Scanning microscopy | Micromanipulation | Nano positioning/measurement | Micromachining |
| Technical Data | ||||
|
Types |
P66.X30S-C |
P66.X30K-C |
Units |
|
|
Active axes |
X |
X |
|
|
|
Drive control |
1 driving channel 1 sensing channel |
1 driving channel |
|
|
|
Nominal travel range（0~120V） |
30 |
30 |
µm±10% |
|
|
Max.travel range（0~150V） |
38 |
38 |
µm±10% |
|
|
Sensor type |
SGS |
– |
|
|
|
Resolution |
1 |
0.5 |
nm |
|
|
Linearity |
0.1 |
– |
%F.S. |
|
|
Repeatability |
0.1 |
– |
%F.S. |
|
|
Push/pull force |
200/10 |
200/10 |
N |
|
|
Stiffness in motion direction |
10 |
10 |
N/μm |
|
|
Unloaded resonant frequency |
2000 |
2000 |
Hz±20% |
|
|
Step time |
5 |
1.5 |
ms±20% |
|
|
Load capacity |
Horizontal |
1 |
1 |
kg |
| Vertical | 0.3 | 0.3 | ||
| Inverted | 1 | 1 | ||
|
El.capacitance |
3.6 |
3.6 |
μF±10% |
|
|
Material |
Al |
Al |
|
|
|
Cable length |
1.5 |
1.5 |
m±10mm |
|
|
Mass |
193 |
193 |
g±5% |
|
| Mounting Method | Horizontal Mounting | Vertical Mounting | Inverted Mounting |
| Definition |
Place the PZT platform horizontally for installation, with the moving surface located above the PZT platform and parallel to the horizontal plane.
PS: Default direction for carrying capacity in the parameter table
|
Place and install the PZT platform vertically, with the moving surface parallel to the direction of gravity PS:There are multiple vertical installation methods, and the technical data corresponds to the minimum load capacity |
Place the PZT platform horizontally, but the moving surface is located below the PZT platform |
| Diagram |  |
 |
 |
| Note | When the mounting method is selected as vertical mounting, pay attention to the outlet port | ||
|
