Description
Characteristics
• 1~3 axes motion • Load capacity to 0.8kg • With Ø25 or Ø35 aperture • Optional UHV compatible version
• Closed-loop version for high repeatability • Z travel to 300μm • XYZ travel to 100μm/axis
Applications
• Scanning interference • Confocal microscopy • Surface measurement
• Wafer positioning • Image processing and stabilization • Optical capture
| Type | S-Closed loop K-Open loop |
P12.X100S P12.X100K |
P12.Z100S P12.Z100K |
P12.Z200S P12.Z200K |
P12.Z300S P12.Z300K |
P12.XY100S P12.XY100K |
P12.XZ100S P12.XZ100K |
P12.XYZ100S P12.XYZ100K |
Units | |||||||
| Active axes | X | Z | Z | Z | X, Y | X, Z | X, Y, Z | |||||||||
| Travel range(0~120V) | 80 | 80 | 160 | 240 | 80/axis | 80/axis | 80/axis | μm±10% | ||||||||
| Travel range(0~150V) | 100 | 100 | 200 | 300 | 100/axis | 100/axis | 100/axis | μm±10% | ||||||||
| Sensor | SGS/- | SGS/- | SGS/- | SGS/- | SGS/- | SGS/- | SGS/- | |||||||||
| Aperture | Ø25/Ø35 | Ø25/Ø35 | Ø25/Ø35 | Ø25/Ø35 | Ø25/Ø35 | Ø25/Ø35 | Ø25/Ø35 | mm | ||||||||
| Resolution | 3/1 | 3/1 | 5.5/2 | 8/2.5 | 3/1 | 3/1 | 3/1 | nm | ||||||||
| Linearity | 0.05/- | 0.05/- | 0.1/- | 0.15/- | 0.1/- | 0.12/- | 0.1/- | %F.S. | ||||||||
| Repeatability | 0.02/- | 0.02/- | 0.05/- | 0.1/- | 0.05/- | 0.08/- | 0.05/- | %F.S. | ||||||||
| Pitch/yaw/roll | <10 | <10 | <15 | <15 | <10 | <10 | <15 | μrad | ||||||||
| Push/pull force | 30/10 | 30/10 | 30/10 | 30/10 | 25/8 | 25/8 | 20/4 | N | ||||||||
| Stiffness | 0.3 | 0.3 | 0.2 | 0.1 | X0.25/Y0.3 | 0.25 | X0.3/Y0.25/Z0.2 | N/μm±20% | ||||||||
| Unloaded resonant frequency |
230 | 220 | 150 | 100 | X180/Y230 | 200 | X230/Y180/Z150 | Hz±20% | ||||||||
| Closed/open-loop unloaded step time |
10/0.8 | 10/0.8 | 15/1.6 | 30/2.4 | 15/0.8 | 30/0.8 | 30/0.8 | ms±20% | ||||||||
| Closed-loop operating frequency (-3dB) |
– | – | – | – | 50 (unloaded) |
– | – | Hz±20% | ||||||||
| Load capacity | 0.8 | 0.8 | 0.5 | 0.4 | 0.7 | 0.6 | 0.6 | kg | ||||||||
| El. capacitance | 1.8 | 1.8 | 3.6 | 5.4 | 1.8/axis | 1.8/axis | 1.8/axis | μF±20% | ||||||||
| Material | Steel, Aluminum | |||||||||||||||
| Mass | 140 | 140 | 200 | 260 | 200 | 200 | 260 | g±5% | ||||||||
Note: Max driving voltage could be -20V~150V, recommended voltage 0~120V for long-term, high-reliability operation. Technical data is measured by CoreMorrow E00/E01 series piezo controller.
