Description
Characteristics
| Travel to 80μm | Load capacity to 0.4kg | Millisecond response time | Closed loop for high repeatability |
| Appearance
|
Moving Part
|
Match brands/sizes of objectives
|
Typical Applications
| 3D imaging | Interference/metering | Surface structure analysis | Confocal microscope |
| Biotechnology | Semiconductor test |
| Technical Data | ||||
|
Type |
S-Closed loop |
P72.Z80S |
P72.Z80K |
Units |
|
K-Open loop |
||||
|
Active axes |
Z |
Z |
|
|
|
Drive control |
1 driving channel 1 sensing channel |
1 driving channel |
|
|
|
Nominal travel range(0~120V) |
64 |
64 |
µm±10% |
|
|
Max.travel range(0~150V) |
80 |
80 |
µm±10% |
|
|
Integrated sensor |
SGS |
– |
|
|
|
Resolution |
3 |
1 |
nm，typ. |
|
|
Closed-loop linearity |
0.1 |
– |
%F.S. |
|
|
Repeatability |
0.05 |
– |
%F.S. |
|
|
Push/pull force |
160/20 |
160/20 |
N |
|
|
Stiffness |
2 |
2 |
N/µm±20% |
|
|
Unloaded resonant frequency |
700 |
700 |
Hz±20% |
|
|
Loaded resonant frequency |
300@400g |
300@400g |
Hz±20% |
|
|
Unloaded step time |
7 |
2.5 |
ms±20% |
|
|
Closed-loop operating frequency (-3dB) |
– |
– |
Hz±20% |
|
|
Load capacity |
0.4 |
0.4 |
Kg |
|
|
El. capacitance |
14 |
14 |
μF±20% |
|
|
Material |
Steel |
Steel |
|
|
|
Mass |
360（no cable） |
360（no cable） |
g±5% |
|
Note: Above parameters are measured with the E00/E01 piezo controller. The maximum driving voltage can be -20V~150V; For highreliability and long-term operation, the recommended driving voltage is 0~120V.
|
