Description
Characteristics
• Piezo drive • High resolution • Stroke up to 30mm, 40 or 50mm travel is available • Small size • Optional XY, XYZ version
Application
• Atomic force microscope • Scientific research • Fiber optic docking • Microfabrication
• Nano positioning with small load & large travel • Precision positioning & micro-nano operation of semiconductors, etc.
| Technical Data | |||||||||
| Type | N56.10K | N56.20K | N56.30K | N56.50K | N56.10E | N56.20E | N56.30E | N56.50E* | Units |
| Active axes | X | X | X | X | X | X | X | X | |
| Integrated sensor | – | grating sensor | |||||||
| Travel range | 10or±5 | 20or±10 | 30or±15 | 50or±25 | 10or±5 | 20or±10 | 30or±15 | 50or±25 | mm |
| Speed limit | 3 | 3 | 3 | 3 | 3 | 3 | 3 | 3 | mm/s±20% |
| Resolution | 5 | 5 | 5 | 5 | 5 | 5 | 5 | 5 | nm |
| Max force | 3 | 3 | 3 | 3 | 3 | 3 | 3 | 3 | N |
| Repeatability | – | – | – | – | 0.1 | 0.12 | 0.15 | 0.2 | μm±20% |
| Max force | – | – | – | – | 3 | 3 | 3 | 3 | N |
| Holding force(Passivity) |
4.5 | 4.5 | 4.5 | 4.5 | 4.5 | 4.5 | 4.5 | 4.5 | N |
| Max load (horizontal direction) |
500 | 500 | 500 | 500 | 500 | 500 | 500 | 500 | g |
| Max load (vertical direction) |
0.1 | 0.1 | 0.1 | 0.1 | 0.1 | 0.1 | 0.1 | 0.1 | kg |
| Axial stiffness | 1.5 | 1.5 | 1.5 | 1.5 | 1.5 | 1.5 | 1.5 | 1.5 | N/μm±20% |
| Lateral stiffness | 9 | 9 | 9 | 9 | 9 | 9 | 9 | 9 | N/μm±20% |
| Operating temperature |
0~50 | 0~50 | 0~50 | 0~50 | 0~50 | 0~50 | 0~50 | 0~50 | ℃ |
| Cable length | 1.5 | 1.5 | 1.5 | 1.5 | 1.5 | 1.5 | 1.5 | 1.5 | m±10mm |
| Material | Al, Steel | Al, Steel | Al, Steel | Al, Steel | Al, Steel | Al, Steel | Al, Steel | Al, Steel | |
| Mass (not include cable) |
40 | 50 | 60 | 82 | 58 | 75 | 85 | 110 | g±10% |
| Recommended Controller |
E53.C1K-J(Digital control, USB and serial port communication) |
E53.D1E-J(Digital control, USB and serial port communication) |
|||||||
*：N56.50E overall dimensions 83x40x15mm
|
|
|
|
|
|
|
|
|
